MKS T3PIA Manuel utilisateur

MKS Type T3PIA

Pendulum Valve

With Analog/TTL Interface

Instruction Manual

Six Shattuck Road

Andover, MA 01810-2449

Main: 978.975.2350 137363-P1

www.mksinst.com Analog/TTL Interface

Rev C

WARRANTY

Type T3PIA Pendulum Valve with Analog/TTL Interface

MKS Instruments, Inc. (MKS) warrants that for one (1) year from the date of shipment the equipment

described above (the “equipment”) manufactured by MKS shall be free from defects in materials and

workmanship.

For the period commencing with the date of shipment of this equipment and ending one (1) year later, MKS

will, at its option, either repair or replace any part which is defective in materials or workmanship without

charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any

breach of MKS of this warranty.

The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by

the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the

equipment and handling any other incidental charges with the MKS Sales Representative or distributor from

which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home

office in Andover, Massachusetts, USA.

This warranty does not apply to any equipment which has not been installed and used in accordance with the

specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be

liable under any circumstances for indirect, special, consequential, or incidental damages in connection with,

or arising out of, the sale, performance, or use of the equipment covered by this warranty.

MKS recommends that all MKS pressure and flow products be calibrated periodically (typically) every 6 to

12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it

is considered normal preventative maintenance not covered by any warranty.

THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR

IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED

WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST

INFRINGEMENT OF ANY PATENT.

MKS Type T3PIA

Pendulum Valve

With Analog/TTL Interface

electronic or mechanical, including photocopying and recording, or by any information storage or retrieval

system, except as may be expressly permitted in writing by MKS Instruments, Inc.

Printed in the United States of America

US Patent 6,089,537 and other Patents Pending

DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL.

SEMI

®

is a registered trademark of Semiconductor Equipment and Materials International, Mountain View,

CA.

Swagelok

®

and VCR

®

are registered trademark of Swagelok Marketing Co., Solon, OH.

Firmware version: 01.02

v

Table of Contents

Valve Safety Information..................................................................................................................................1

Symbols Used in This Instruction Manual ....................................................................................................................1

Symbols Found on the Unit...........................................................................................................................................1

Safety Procedures and Precautions................................................................................................................................1

Sicherheitshinweise für das Ventil....................................................................................................................3

In dieser Betriebsanleitung vorkommende Symbole.....................................................................................................3

Erklärung der am Gerät angebrachten Symbole............................................................................................................3

Sicherheitsvorschriften und Vorsichtsmaßnahmen .......................................................................................................3

Informations de sécurité relatives au manomètre...........................................................................................5

Symboles utilisés dans ce manuel d’utilisation.............................................................................................................5

Symboles figurant sur l’unité ........................................................................................................................................5

Mesures de sécurité et précautions................................................................................................................................5

Medidas de seguridad del manómetro.............................................................................................................7

Símbolos usados en este manual de instrucciones.........................................................................................................7

Símbolos hallados en la unidad.....................................................................................................................................7

Procedimientos y precauciones de seguridad................................................................................................................7

Chapter One: General Information ................................................................................................................9

Introduction...................................................................................................................................................................9

How This Manual is Organized...................................................................................................................................10

Customer Support........................................................................................................................................................10

Chapter Two: Installation..............................................................................................................................11

Unpacking the Type T3P Unit.....................................................................................................................................11

Interface Cables...........................................................................................................................................................11

Product Location and Requirements............................................................................................................................13

Setup............................................................................................................................................................................14

Setup Procedures.........................................................................................................................................................17

Electrical Information..................................................................................................................................................18

Startup .........................................................................................................................................................................23

Chapter Three: Product Overview................................................................................................................25

General Information ....................................................................................................................................................25

Control Mode ..............................................................................................................................................................25

Trip Points...................................................................................................................................................................30

Top Panel Components................................................................................................................................................32

Labels..........................................................................................................................................................................34

Chapter Four: Analog/TTL Operation.........................................................................................................35

General Information ....................................................................................................................................................35

Selecting the Digital Input Functions..........................................................................................................................35

Setting the Analog Set Point Inputs.............................................................................................................................36

Selecting the Digital Output Functions........................................................................................................................36

Using RS-232 Commands with an Analog T3P..........................................................................................................36

Chapter Five: Maintenance and Troubleshooting.......................................................................................37

General Information ....................................................................................................................................................37

Maintenance ................................................................................................................................................................37

vi

Preventive Maintenance ..............................................................................................................................................37

Troubleshooting...........................................................................................................................................................45

Appendix A: Product Specifications.............................................................................................................47

Appendix B: Model Code Explanation.........................................................................................................49

Model Code.................................................................................................................................................................49

Appendix C: Dimensions ...............................................................................................................................51

Index.................................................................................................................................................................61

List of Figures

Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable........................................12

Figure 2: Alternate Method To Connect an Overall Metal Braided Shielded Cable........................................13

Figure 3: Typical System Configuration..........................................................................................................14

Figure 4: Top Panel of the T3P Unit................................................................................................................ 19

Figure 5: Typical Pressure Response in LEARN Mode...................................................................................27

Figure 6. Typical Chamber Pump Speed Curve...............................................................................................27

Figure 7: Phase Set Too High...........................................................................................................................28

Figure 8: Phase Set Too Low ...........................................................................................................................28

Figure 9: Gain Set Too High............................................................................................................................29

Figure 10: Gain Set Too Low...........................................................................................................................29

Figure 11: Trip Point Direction Set Low..........................................................................................................31

Figure 12: Trip Point Direction Set High.........................................................................................................31

Figure 13: Top Panel of the T3P Unit.............................................................................................................. 32

Figure 14: Pump Label.....................................................................................................................................34

Figure 15: Serial Number Label.......................................................................................................................34

Figure 16: Four (4) Valve Cover Screws..........................................................................................................38

Figure 17: Gate Bolt.........................................................................................................................................38

Figure 18: Handle.............................................................................................................................................39

Figure 19: Seal Ring Removal .........................................................................................................................39

Figure 20: Lubricating O-Ring Groove............................................................................................................40

Figure 21: Seal Ring in Valve Body................................................................................................................. 41

Figure 22: Removing Phillips Head Screws..................................................................................................... 43

Figure 23: Removing Battery Pack from Device .............................................................................................43

Figure 24: Installing the New Battery Pack......................................................................................................44

vii

List of Tables

Table 1: Definition of Symbols Found on the Unit.............................................................................................1

Tabelle 2: Bedeutung der am Gerät angebrachten Symbole...............................................................................3

Tableau 3: Définition des symboles sur l’unité ..................................................................................................5

Tabla 4: Definición de los símbolos hallados en la unidad.................................................................................7

Table 5: Definitions ............................................................................................................................................9

Table 6: Maximum Torque Levels When Mounting With the Centering Ring and Spacer Ring.....................15

Table 7: Maximum Torque Levels When Mounting with the O-Ring in Groove ............................................15

Table 8: Admissible Forces ..............................................................................................................................15

Table 9: Mounting Screw Length .....................................................................................................................16

Table 10: Required Air Pressure Based on Valve Size.....................................................................................16

Table 11: Auxiliary Connector Pin Out............................................................................................................20

Table 12: Analog Sensor 1 (High) Connector Pin Out.....................................................................................21

Table 13: Analog Sensor 2 (Low) Connector Pin Out......................................................................................22

Table 14: Power Connector Pin Out.................................................................................................................22

Table 15: Differential Pressure.........................................................................................................................23

Table 16: Position Status LED Indicators.........................................................................................................33

Table 17: Pressure Status LED Indicators ........................................................................................................33

Table 18: Digital Input Functions.....................................................................................................................35

Table 19: Digital Output Functions ..................................................................................................................36

Table 20: Seal Ring Quantity of Grease ...........................................................................................................40

Table 21: O-Ring Quantity of Grease...............................................................................................................40

Table 22: Valve Cover Screw Torque...............................................................................................................42

Table 23: Software Command Reference.........................................................................................................42

viii

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Valve Safety Information

1

Valve Safety Information

Symbols Used in This Instruction Manual

Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual are:

Warning

The WARNING sign denotes a hazard. It calls attention to a procedure, practice,

condition, or the like, which, if not correctly performed or adhered to, could result

in injury to personnel.

Caution

The CAUTION sign denotes a hazard. It calls attention to an operating procedure,

practice, or the like, which, if not correctly performed or adhered to, could result in

damage to or destruction of all or part of the product.

Note

The NOTE sign denotes important information. It calls attention to a procedure, practice,

condition, or the like, which is essential to highlight.

Symbols Found on the Unit

The following table describes symbols that may be found on the unit.

Table 1: Definition of Symbols Found on the Unit

|

On (Supply)

IEC 417, No. 5007

Off (Supply)

IEC 417, No. 5008

Earth (ground)

IEC 417, No. 5017

Protective Earth (ground)

IEC 417, No. 5019

Frame or Chassis

IEC 417, No. 5020

Equipotentiality

IEC 417, No. 5021

Direct Current

IEC 417, No. 5031

Alternating Current

IEC 417, No. 5032

Both Direct and Alternating

Current

IEC 417, No. 5033-a

Class II Equipment

IEC 417, No. 5172-a

Three Phase

Alternating Current

IEC 617-2, No. 020206

Caution, Hand Crush

ISO 3864

Caution (refer to

accompanying documents)

ISO 3864, No. B.3.1

Caution, Risk of Electric

Shock

ISO 3864, No. B.3.6

Caution, Hot Surface

IEC 417, No. 5041

Caution, Spring Loaded

ISO 3864

Safety Procedures and Precautions

Observe the following general safety precautions during all phases of operation of this instrument.

Failure to comply with these precautions or with specific warnings elsewhere in this manual violates

safety standards of intended use of the instrument and may impair the protection provided by the

equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these

requirements.

Valve Safety Information

2

Warning

Moving parts in the valve create a risk of personal injury until the valve is securely

incorporated into a system. To avoid injury, keep all body parts away from any

valve opening.

1.

Do not insert objects into openings where contact with moving parts is

possible.

2.

Isolate the valve from any electrical or pneumatic power supply before

handling the valve.

DO NOT SUBSTITUTE PARTS OR MODIFY VALVE

Do not install substitute parts or perform any unauthorized modification to the valve. Return the valve to an MKS

Calibration and Service Center for service and repair to ensure that all safety features are maintained.

SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not attempt component replacement and internal adjustments. Qualified service personnel

must perform any service only.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, observe the proper safety precautions, completely purge the valve when necessary, and

ensure that the material used is compatible with the wetted materials in this product, including any sealing materials.

PURGE THE VALVE

After installing the unit, or before removing it from a system, purge the unit completely with a clean, dry gas to eliminate

all traces of the previously used flow material.

USE PROPER PROCEDURES WHEN PURGING

This valve must be purged under a ventilation hood and gloves must be worn for protection.

DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT

To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for

such operation.

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All valve fittings must be consistent with valve specifications and compatible with the intended use of the valve.

Assemble and tighten fittings according to manufacturer’s directions.

CHECK FOR LEAK-TIGHT FITTINGS

Carefully check all vacuum component connections to ensure leak-tight installation.

OPERATE AT SAFE INLET PRESSURES

Never operate the valve at pressures higher than the rated maximum pressure (refer to the product specifications for the

maximum allowable pressure).

INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system

explosion should the system pressure rise.

KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt, lint, glass chips, and

metal chips may permanently damage the unit or contaminate the process.

KEEP AWAY FROM VALVE OPENING

Keep fingers, other body parts, and other materials away from the valve opening when the valve is in operation.

Sicherheitshinweise für das Ventil

3

Sicherheitshinweise für das Ventil

In dieser Betriebsanleitung vorkommende Symbole

Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser

Betriebsanleitung.

Warnung!

Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es

macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine

sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.

ungenügende Berücksichtigung zu Verletzungen führen kann.

Vorsicht!

Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf

einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit

aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende

Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von

Teilen des Gerätes führen kann.

Hinweis

Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines

Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit

aufmerksam.

Erklärung der am Gerät angebrachten Symbole

Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können.

Tabelle 2: Bedeutung der am Gerät angebrachten Symbole

|

Ein (Energie)

IEC 417, No.5007

Aus (Energie)

IEC 417, No.5008

Erdanschluss

IEC 417, No.5017

Schutzleiteranschluss

IEC 417, No.5019

Masseanschluss

IEC 417, No.5020

Aquipotentialanschluss

IEC 417, No.5021

Gleichstrom

IEC 417, No.5031

Wechselstrom

IEC 417, No.5032

Gleich- oder Wechselstrom

IEC 417, No.5033-a

Durchgängige doppelte

oder verstärkte Isolierung

IEC 417, No.5172-a

Dreileiter-Wechselstrom

(Drehstrom)

IEC 617-2, No.020206

Vorsicht: Quetschgefahr für

die Hand

ISO 3864

Warnung vor einer

Gefahrenstelle (Achtung,

Dokumentation beachten)

ISO 3864, No.B.3.1

Warnung vor gefährlicher

elektrischer Spannung

ISO 3864, No.B.3.6

Höhere Temperatur an

leicht zugänglichen Teilen

IEC 417, No.5041

Vorsicht: Federspannung

ISO 3864

Sicherheitsvorschriften und Vorsichtsmaßnahmen

Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu

befolgen. Eine Missachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser

Sicherheitshinweise für das Ventil

4

Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards,

und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc.

haftet nicht für Missachtung dieser Sicherheitsvorschriften seitens des Kunden.

Warnung

Solange das Ventil nicht fest in ein System eingebaut ist, besteht

Verletzungsgefahr aufgrund von beweglichen Teilen. Daher Finger und andere

Körperteile unbedingt von allen Ventilöffnungen fernhalten.

1. Niemals Fremdkörper in Öffnungen einführen, in denen ein Kontakt mit

beweglichen Teilen möglich ist.

2. Das Ventil vor dem Hantieren stets von allen elektrischen und pneumatischen

Kraftquellen trennen.

Niemals Teile austauschen oder Änderungen am Ventil vornehmen!

Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am

Ventil vor. Schicken Sie das Ventil zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein.

Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben.

Wartung nur durch qualifizierte Fachleute!

Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten

Fachleuten durchgeführt werden, niemals vom Bedienpersonal.

Vorsicht beim Arbeiten mit gefährlichen Stoffen!

Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechenden Sicherheitsvorschriften genauestens

einhalten, das Ventil, falls erforderlich, vollständig spülen, sowie sicherstellen, daß der Gefahrstoff die von ihm

benetzten, im Ventil verwendeten Materialien, insbesondere Dichtungen, nicht angreift.

Spülen des Ventils mit Gas!

Nach dem Installieren oder vor dem Ausbau aus einem System muß das Ventil unter Einsatz eines reinen Trockengases

vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen.

Anweisungen zum Spülen des Ventils!

Das Ventil darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.

Nicht zusammmen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!

Um der Gefahr einer Explosion vorzubeugen, darf dieses Produkt niemals zusammen mit explosiven Stoffe aller Art

eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.

Anweisungen zum Installieren der Armaturen!

Alle Ventilanschlußstücke und Armaturenteile müssen mit den Ventilspezifikationen übereinstimmen, und mit dem

geplanten Einsatz des Ventils kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den

Anweisungen des Herstellers vorgenommen werden.

Ventil auf Undichtigkeiten prüfen!

Überprüfen Sie sorgfältig alle Verbindungen auf undichte Stellen.

Nur unter zulässigen Anschlußdrücken betreiben!

Betreiben Sie das Ventil niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen)

übersteigen.

Geeignete Berstscheibe installieren!

Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete Berstscheibe in das

Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden.

Verunreinigungen vermeiden!

Stellen Sie sicher, daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das Innere

gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Produkt dauerhaft beschädigen

oder Prozeß und Meßwerte verfälschen.

Hände weg von der Ventilöffnung!

Körperteile, insbesondere Finger, sowie Fremdobjekte während des Betriebes von der Ventilöffnung fernhalten.

Informations de sécurité relatives au manomètre

5

Informations de sécurité relatives au manomètre

Symboles utilisés dans ce manuel d’utilisation

Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.

Avertissement

L’indication AVERTISSEMENT signale un danger pour le personnel. Elle

attire l’attention sur une procédure, une pratique, une condition, ou toute

autre situation présentant un risque d’accident pour le personnel, en cas

d’exécution incorrecte ou de non-respect des consignes.

Attention

L’indication ATTENTION signale un danger pour l’appareil. Elle attire

l’attention sur une procédure d’exploitation, une pratique, ou toute autre

situation, présentant un risque de dégât ou de destruction partielle ou totale

du produit, en cas d’exécution incorrecte ou de non-respect des consignes.

Remarque

L’indication REMARQUE signale une information importante. Elle attire

l’attention sur une procédure, une pratique, une condition, ou toute autre situation,

présentant un intérêt particulier.

Symboles figurant sur l’unité

Le tableau suivant décrit les symboles pouvant apparaître sur l’unité.

Tableau 3: Définition des symboles sur l’unité

|

Marche (sous tension)

IEC 417, No.5007

Arrêt (hors tension)

IEC 417, No.5008

Terre (masse)

IEC 417, No.5017

Terre de protection (masse)

IEC 417, No.5019

Masse

IEC 417, No.5020

Equipotentialité

IEC 417, No.5021

Courant continu

IEC 417, No.5031

Courant alternatif

IEC 417, No.5032

Courant continu et alternatif

IEC 417, No.5033-a

Matériel de classe II

IEC 417, No.5172-a

Courant alternatif triphasé

IEC 617-2, No.020206

Attention : Danger

d’écrasement de la main

ISO 3864

Attention : se reporter

à la documentation

ISO 3864, No.B.3.1

Attention : risque de

choc électrique

ISO 3864, No.B.3.6

Attention : surface brûlante

IEC 417, No.5041

Attention : Ce dispositif est à

ressort

ISO 3864

Mesures de sécurité et précautions

Observer les précautions générales de sécurité suivantes pendant toutes les phases d’exploitation de cet

appareil. Le non-respect des ces précautions ou des avertissements du manuel constitue une violation

des normes de sécurité relatives à l’utilisation de l’appareil et peut compromettre la protection assurée

Informations de sécurité relatives au manomètre

6

par l’appareil. MKS Instruments, Inc. rejette toute responsabilité en cas de non-respect des consignes

par les clients.

Avertissement

Les pièces mobiles de la valve peuvent être une cause d'accident tant que la

valve n'est pas solidement incorporée dans un système. Pour éviter tout

accident, tenir toute partie du corps à distance de toute ouverture de la valve.

1. Ne pas insérer des objets dans les ouvertures où le contact avec des

pièces mobiles est possible.

2. Isoler la valve de toute source d'alimentation électrique ou pneumatique

pendant la manipulation de la valve.

PAS DE SUBSTITUTION DE PIÈCES OU DE MODIFICATION DE LA VALVE

Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la valve. Renvoyer la valve à

un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs

de sécurité.

DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ

Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire des réglages internes. Tout

dépannage doit être uniquement effectué par du personnel qualifié.

PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX

Si des produits dangereux sont utilisés, prendre les mesures de précaution appropriées, purger complètement la valve

quand cela est nécessaire, et s'assurer que les produits utilisés sont compatibles avec les composants liquides de

l'appareil, y compris les matériaux d'étanchéité.

PURGE DE LA VALVE

Après l'installation de l'unité, ou avant son enlèvement d'un système, purger l'unité complètement avec un gaz propre et

sec afin d'éliminer toute trace du produit de flux utilisé précédemment.

UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE

Cette valve doit être purgée sous une hotte de ventilation, et il faut porter des gants de protection.

PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF

Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation

spécifique pour une telle exploitation.

UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE

Tous les équipements de la valve doivent être cohérents avec ses spécifications, et compatibles avec l'utilisation prévue

de la valve. Assembler et serrer les équipements conformément aux directives du fabricant.

VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS

Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation.

EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES

Ne jamais utiliser la valve avec des pressions supérieures à la pression nominale maximum (se reporter aux

spécifications de l'unité pour la pression maximum admissible).

INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ

En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté dans le système à vide

afin d'éviter une explosion du système en cas d'augmentation de la pression.

MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS

Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants

tels que des poussières et des fragments de tissu, de glace et de métal peuvent endommager l'unité d'une manière

permanente ou contaminer le processus.

PRÉCAUTION AVEC L'OUVERTURE DE LA VALVE

Éviter tout contact des mains, toute autre partie du corps, ou tout autre matériel avec l'ouverture de la valve quand celle-

ci est en fonctionnement.

Medidas de seguridad del manómetro

7

Medidas de seguridad del manómetro

Símbolos usados en este manual de instrucciones

Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.

Advertencia

El símbolo de advertencia indica la posibilidad de que se produzcan daños

personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso

de no realizarse o cumplirse correctamente puede causar daños personales.

Precaución

El símbolo de precaución indica la posibilidad de producir daños al equipo.

Pone de relieve un procedimiento operativo, práctica, etc. que en caso de no

realizarse o cumplirse correctamente puede causar daños o la destrucción total

o parcial del equipo.

Nota

El símbolo de notas indica información de importancia. Este símbolo pone de relieve

un procedimiento, práctica o condición cuyo conocimiento es esencial destacar.

Símbolos hallados en la unidad

La tabla siguiente contiene los símbolos que puede hallar en la unidad.

Tabla 4: Definición de los símbolos hallados en la unidad

|

Encendido

(alimentación eléctrica)

IEC 417, N° 5007

Apagado

(alimentación eléctrica)

IEC 417, N° 5008

Puesta a tierra

IEC 417, N° 5017

Protección a tierra

IEC 417, N° 5019

Caja o chasis

IEC 417, N° 5020

Equipotencialidad

IEC 417, N° 5021

Corriente continua

IEC 417, N° 5031

Corriente alterna

IEC 417, N° 5032

Corriente continua y alterna

IEC 417, N° 5033-a

Equipo de clase II

IEC 417, N° 5172-a

Corriente alterna trifásica

IEC 617-2, N° 020206

Precaución. Peligro de

aplastamiento de la mano

ISO 3864

Precaución. Consulte los

documentos adjuntos

ISO 3864, N° B.3.1

Precaución.

Riesgo de descarga eléctrica

ISO 3864, N° B.3.6

Precaución. Superficie

caliente

IEC 417, N° 5041

Precaución. Dispositivo a

presión

ISO 3864

Procedimientos y precauciones de seguridad

Las medidas generales de seguridad descritas a continuación deben observarse durante todas las etapas

de funcionamiento del instrumento. La falta de cumplimiento de dichas medidas de seguridad o de las

advertencias específicas a las que se hace referencia en otras partes de este manual, constituye una

violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular

Medidas de seguridad del manómetro

8

la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias,

MKS Instruments, Inc. no asume responsabilidad legal alguna.

Advertencia

Hasta que la válvula sea incorporada en forma segura al sistema, las piezas en

movimiento presentes en la misma pueden causar daños personales. Para

evitarlo, mantenga todo el cuerpo alejado de la abertura de válvula.

1. No introduzca por las aberturas objetos que puedan entrar en contacto con

piezas en movimiento.

2. Antes de tocar la válvula, aíslela de toda fuente de alimentación neumática

o eléctrica.

NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE LA VÁLVULA

No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el correcto

funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de servicio y calibración de MKS toda

vez que sea necesario efectuar reparaciones o tareas de mantenimiento.

LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS

Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior. Las tareas de

mantenimiento o reparación deben ser realizadas únicamente por personal autorizado.

TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS

Cuando se utilicen materiales tóxicos, los operarios deberán cumplir las medidas de seguridad correspondientes, purgar

totalmente la válvula cuando sea necesario y comprobar que el material utilizado sea compatible con los materiales

humedecidos del instrumento e inclusive, con los materiales de sellado.

PURGUE LA VÁLVULA

Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con gas limpio y seco para

eliminar todo resto de la sustancia líquida empleada anteriormente.

USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA

La válvula debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores.

NO HAGA FUNCIONAR LA VÁLVULA EN UN AMBIENTE CON RIESGO DE EXPLOSIONES

Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente con riesgo de explosiones,

excepto cuando el mismo haya sido certificado específicamente para tal uso.

USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE

Todos los accesorios de la válvula deben cumplir las especificaciones de la misma y ser compatibles con el uso que se

debe dar a la válvula. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.

COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS

Inspeccione cuidadosamente las conexiones de los componentes de vacío para comprobar que hayan sido instalados a

prueba de fugas.

HAGA FUNCIONAR LA VÁLVULA CON PRESIONES DE ENTRADA SEGURAS

No haga funcionar nunca la válvula con presiones superiores a la máxima presión nominal (en las especificaciones del

instrumento hallará la presión máxima permitida).

INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA

Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de seguridad adecuada en el

sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema.

MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES

No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como

polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad o contaminar el

proceso.

MANTÉNGASE ALEJADO DE LA ABERTURA DE LA VÁLVULA

Cuando la válvula esté funcionando, mantenga los dedos, otras partes del cuerpo y otros materiales alejados de la abertura.

Introduction Chapter One: General Information

9

Chapter One: General Information

Introduction

The MKS Type T3P Throttle Valve is designed for use in downstream pressure control applications.

The T3P unit consists of a throttling isolation valve with an electronic housing attached to the motor plate, a

microprocessor, driver circuits which eliminate the need for a separate controller box, the RS-232 serial

communications interface, and analog outputs that reflect pressure or valve position. The valve is controlled

by using digital values sent through the serial network.

The operation of the controller is based on a digital pressure/position control algorithm that directs the valve

to the proper position for either pressure or position control. The pressure or position setpoint is sent as a

digital serial command. The T3P unit reads the pressure signal used for control applications directly from an

MKS Baratron pressure transducer. All of the unit’s operational settings are controlled using the serial

communication protocol.

When the T3P controller is turned off or experiences an unexpected power loss, all calibration constants are

saved in non-volatile memory.

Protection from RF interference and noisy electrical environments is increased by the use of a metal case, by

internal design elements, and by the use of surge and ESD suppression networks and RFI filtering on all

inputs and outputs. The T3P unit meets the testing standards required for the European CE Mark when used

with an overall metal braided shielded cable, properly grounded at both ends.

Definitions

Table 5: Definitions

Term Description

Full Scale (FS) Range The defined 100% value of an attribute, in its assigned units

Sccm Standard cubic centimeters per minute

Setpoint The pressure value to which the device is controlling the flow of gas

Slm Standard liters per minute

Trip Point An alarm or warning level

Chapter One: General Information How This Manual is Organized

10

How This Manual is Organized

This manual is designed to provide instructions on how to set up, install, and operate a Type T3P unit.

Before installing your Type T3P unit in a system and/or operating it, carefully read and familiarize

yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this

manual. In addition, observe and obey all

WARNING and CAUTION notes provided throughout the

manual.

Chapter One, General Information, (this chapter) introduces the product and describes the organization of the

manual.

Chapter Two, Installation, explains the environmental requirements and describes how to mount the

instrument in your system. This chapter provides setup and installation procedures.

Chapter Three, Product Overview, gives a brief description of the instrument and its functionality.

Chapter Four, Analog/TTL Operation, describes how to operate the instrument, including how to select the

digital input functions, how to set the analog set point inputs, how to select the digital output functions, and

how to use RS-232 commands with an analog T3P/B.

Chapter Five, Maintenance and Troubleshooting, lists any maintenance required to keep the instrument in

good working condition, and provides a checklist for reference should the instrument malfunction.

Appendix A, Product Specifications, lists the specifications of the instrument.

Appendix B, Model Code Explanation, describes the model code used to order the instrument.

Appendix C, Dimensions, contains line drawings of the various sizes of the T3P Analog/TTL.

Customer Support

Standard maintenance and repair services are available at all of our regional MKS Calibration and Service

Centers, listed on the back cover. In addition, MKS accepts the instruments of other manufacturers for

recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional

service centers.

Should any difficulties arise in the use of your Type T3P instrument, or to obtain information about

companion products MKS offers, contact any authorized MKS Calibration and Service Center. If it is

necessary to return the instrument to MKS, please obtain an ERA Number (Equipment Return Authorization

Number) from the MKS Calibration and Service Center before shipping. The ERA Number expedites

handling and ensures proper servicing of your instrument.

Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.

Warning

All returns to MKS Instruments must be certified free of harmful, corrosive,

radioactive, or toxic materials.

Unpacking the Type T3P Unit Chapter Two: Installation

11

Chapter Two: Installation

Unpacking the Type T3P Unit

MKS has carefully packed the Type T3P unit so that it will reach you in perfect operating order. Upon

receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that

damage has not occurred during shipment.

Note

Do not discard any packing materials until you have completed your inspection and are sure

the unit arrived safely.

If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to

MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center

before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and

Service Centers.

Caution

Only qualified individuals should perform the installation and any user adjustments.

They must comply with all the necessary ESD and handling precautions while

installing and adjusting the instrument. Proper handling is essential when working

with all highly sensitive precision electronic instruments.

Unpacking Checklist

Standard Equipment:

 Type T3P Unit

 Type T3PIA Pendulum Valve With Analog/TTL Interface Instruction Manual (this book)

 MKS Type T3BIA/T3PIA Valves with RS-232 Interface Supplement, MKS p/n 134414-P1

You will need the Supplement to perform the installation using the procedures provided in this manual.

Interface Cables

Note

An overall metal braided, shielded cable, properly grounded at both ends, is required to meet

CE Mark specifications.

Chapter Two: Installation Interface Cables

12

Generic Shielded Cable Description

MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables,

follow the guidelines listed below:

1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral

shielding will be as effective; using either may nullify regulatory compliance.

2. The connectors must have a metal case with direct contact to the cable shield on the whole circumference

of the cable. The inductance of a flying lead or wire from the shield to the connector will seriously

degrade the shield’s effectiveness. Ground the shield to the connector before its internal wires exit.

3. With very few exceptions, the connector(s) must make good contact to the controller’s case (ground).

“Good contact” is about 0.01 ohms and the ground should surround all wires. Contact to ground at just

one point may not suffice.

4. For shielded cables with flying leads at one or both ends. It is important to ground the shield at each such

end before the wires exit. Make this ground with absolute minimum length. Refer to Figures 1 and 2.

(A ¼-inch piece of #22 wire may be undesirably long since it has approximately 5 nH of inductance,

equivalent to 31 ohms at 1000 MHz). After picking up the braid ground, keep wires and braid flat against

the case. With very few exceptions, grounded metal covers are not required over terminal strips. If one is

required, it will be stated in the Declaration of Conformity.

5. In selecting the appropriate type and wire size for cables, consider:

A. Voltage ratings.

B. Cumulative I

2

R heating of all the conductors (keep them safely cool).

C. IR drop of the conductors, so that adequate power or signal voltage gets to the controller.

D. Capacitance and inductance of cables that handle fast signals (such as data lines or stepper motor

drive cables).

E. Some cables may need internal shielding from specific wires to others.

Example 1: Preferred Method to Connect Cable

(shown on a transducer)

Transducer

Overall Insulation

(if present)

Bare Metal Cable Clamp

Making Firm Contact To Braid

Braid Here Is Desirable

(but not usually necessary)

Keep Wires and Braid

Flat Against Case

Metal Cable Clamp

Screw

Split Lock Washer

External Tooth Lock Washer

Transducer Housing

Optional Plastic or Metal Cable

Clamp (For Physical Strain Relief)

Figure 1: Preferred Method To Connect an Overall Metal Braided Shielded Cable

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MKS T3PIA Manuel utilisateur

MKS T3PIA Manuel utilisateur

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