User Manual
MODEL 470
Dissolved Ozone Sensor
© T
ELEDYNE API (TAPI)
9970 CARROLL CANYON ROAD
SAN DIEGO, CALIFORNIA 92131-1106
USA
Toll-free Phone:
800-324-5190
Phone:
+1 858-657-9800
Fax:
+1 858-657-9816
Email:
api-sales@teledyne.com
Website:
http://www.teledyne-api.com/
Copyright 2019 08681B DCN8036
Teledyne API 15 January 2019
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual i
NOTICE OF COPYRIGHT
© 2019 Teledyne API. All rights reserved.
TRADEMARKS
All trademarks, registered trademarks, brand names or product names appearing in
this document are the property of their respective owners and are used herein for
identification purposes only.
ii Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
SAFETY MESSAGES
Important safety messages are provided throughout this manual for the purpose of
avoiding personal injury or instrument damage. Please read these messages
carefully. Each safety message is associated with a safety alert symbol and is placed
throughout this manual; the safety symbols are also located inside the instrument. It
is imperative that you pay close attention to these messages, the descriptions of
which are as follows:
WARNING: Electrical Shock Hazard
HAZARD: Strong oxidizer
GENERAL WARNING/CAUTION: Read the accompanying message
for specific information.
CAUTION: Hot Surface Warning
Do Not Touch: Touching some parts of the instrument without
protection or proper tools could result in damage to the part(s)
and/or the instrument.
Technician Symbol: All operations marked with this symbol are to be
performed by qualified maintenance personnel only.
Electrical Ground: This symbol inside the instrument marks the
central safety grounding point for the instrument.
CAUTION
This instrument should only be used for the purpose and in the
manner described in this manual. If you use this instrument in a
manner other than that for which it was intended, unpredictable
behavior could ensue with possible hazardous consequences.
NEVER use any ozone analyzer to sample combustible fluid(s)!
For Technical Assistance regarding the use and maintenance of this instrument or
any other Teledyne API product, contact Teledyne API’s Technical Support
Department:
Telephone: 800-324-5190
Email: api-techsupport@teledyne.com
or access any of the service options on our website at http://www.teledyne-api.com/
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual iii
CONSIGNES DE SÉCURITÉ
Des consignes de sécurité importantes sont fournies tout au long du présent manuel
dans le but d’éviter des blessures corporelles ou d’endommager les instruments.
Veuillez lire attentivement ces consignes. Chaque consigne de sécurité est
représentée par un pictogramme d’alerte de sécurité; ces pictogrammes se retrouvent
dans ce manuel et à l’intérieur des instruments. Les symboles correspondent aux
consignes suivantes :
AV
ERTISSEMENT : Risque de choc électrique
DA
NGER : Oxydant puissant
AVERTISSEMENT GÉNÉRAL / MISE EN GARDE : Lire la
consigne complémentaire pour des renseignements
spécifiques
M
ISE EN GARDE : Surface chaude
Ne pas toucher : Toucher à certaines parties de l’instrument
sans protection ou sans les outils appropriés pourrait entraîner
des dommages aux pièces ou à l’instrument.
Pictogramme « technicien » : Toutes les opérations portant ce
symbole doivent être effectuées uniquement par du personnel
de maintenance qualifié.
Mise à la terre : Ce symbole à l’intérieur de l’instrument
détermine le point central de la mise à la terre sécuritaire de
l’instrument.
MISE EN GARDE
Cet instrument doit être utilisé aux fins décrites et de la manière
décrite dans ce manuel. Si vous utilisez cet instrument d’une
autre manière que celle pour laquelle il a été prévu, l’instrument
pourrait se comporter de façon imprévisible et entraîner des
conséquences dangereuses.
NE JAMAIS utiliser un analyseur de ozone pour échantillonner
des fluide combustibles!
iv Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
WARRANTY
WARRANTY POLICY (02024J)
Teledyne API (TAPI), a business unit of Teledyne Instruments, Inc., provides that:
Prior to shipment, TAPI equipment is thoroughly inspected and tested. Should
equipment failure occur, TAPI assures its customers that prompt service and support
will be available. (For the instrument-specific warranty period, please refer to the
“Limited Warranty” section in the Terms and Conditions of Sale on our website at
the following link: http://www.teledyne-api.com/terms_and_conditions.asp).
COVERAGE
After the warranty period and throughout the equipment lifetime, TAPI stands ready
to provide on-site or in-plant service at reasonable rates similar to those of other
manufacturers in the industry. All maintenance and the first level of field
troubleshooting are to be performed by the customer.
NON-TAPI MANUFACTURED EQUIPMENT
Equipment provided but not manufactured by TAPI is warranted and will be
repaired to the extent and according to the current terms and conditions of the
respective equipment manufacturer’s warranty.
PRODUCT RETURN
All units or components returned to Teledyne API should be properly packed for
handling and returned freight prepaid to the nearest designated Service Center. After
the repair, the equipment will be returned, freight prepaid.
The complete Terms and Conditions of Sale can be reviewed at
http://www.teledyne-api.com/terms_and_conditions.asp
CAUTION – Avoid Warranty Invalidation
Failure to comply with proper anti
-Electro-Static Discharge (ESD)
handling and packing instructions and Return Merchandise
Authorization (RMA) procedures when returning parts for repair or
calibration may void your warranty. For anti
-ESD handling and
packing instructions please refer to
the manual, Fundamentals of
ESD, PN 04786, in its
“Packing Components for Return to Teledyne
API’s Customer Service”
section. The manual can be downloaded
from our website at
http://www.teledyne-api.com. RMA procedures
ca
n also be found on our website.
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual v
TABLE OF CONTENTS
Safety Messages ...................................................................................................................................... ii
Warranty .................................................................................................................................................. iv
Table of Contents ..................................................................................................................................... v
List of Figures ........................................................................................................................................... v
List of Tables ............................................................................................................................................ v
1. INTRODUCTION, SPECIFICATIONS, APPROVALS, & COMPLIANCE ................................................. 6
Specifications .................................................................................................................................... 6
Safety ................................................................................................................................................ 7
EMC .................................................................................................................................................. 7
2. GETTING STARTED ................................................................................................................................ 8
Unpacking ......................................................................................................................................... 8
Mechanical Installation ...................................................................................................................... 9
Pneumatic Connections .................................................................................................................. 10
Electrical Connections ..................................................................................................................... 11
Power Supply ....................................................................................................................... 11
Analog Output ...................................................................................................................... 11
Zero Calibration Input .......................................................................................................... 12
Status Outputs ..................................................................................................................... 12
Serial Communication Interface ........................................................................................... 12
3. OPERATION ........................................................................................................................................... 13
Initial Power-on and Warm-up......................................................................................................... 13
Zeroing the Sensor .......................................................................................................................... 13
4. TROUBLESHOOTING ............................................................................................................................ 14
Status Output Summary .................................................................................................................. 14
Status Output Descriptions ............................................................................................................. 15
Sensor O.K. .......................................................................................................................... 15
Invalid Reading .................................................................................................................... 15
Lamp Low ............................................................................................................................. 15
Cell Dirty ............................................................................................................................... 15
5. MAINTENANCE ...................................................................................................................................... 16
Technical Assistance ...................................................................................................................... 16
LIST OF FIGURES
Figure 2-1. Sensor Diagram ......................................................................................................................... 8
Figure 2-2. Sensor Dimensions (control interface cable fixture not shown) ................................................ 9
Figure 2-3: In-Line, Full-Flow Configuration ............................................................................................... 10
Figure 2-4: Typical Installation, In-Line or Side-Stream ............................................................................. 10
Figure 2-5: Customer Interface .................................................................................................................. 11
Figure 2-6: Digital Status Outputs .............................................................................................................. 12
LIST OF TABLES
Table 1-1. Specifications ............................................................................................................................... 6
Table 4-1: Status Outputs .......................................................................................................................... 14
Table 4-2: Status Output Truth Table ........................................................................................................ 14
6 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
1. INTRODUCTION, SPECIFICATIONS, APPROVALS, & COMPLIANCE
Teledyne API’s Model 470 Dissolved Ozone Analyzer is designed for continuous
measurement of dissolved ozone in deionized water with ranges up to 150 mg/l. Designed
for semiconductor wet bench systems and many other industrial processes, the Model 470
sensor is “clean ready” for applications with high purity requirements. Its innovative dual
optical-path sample sensing technology virtually eliminates the need for a reference fluid
measurement.
The Model 470 operates from an external +15 VDC power source, and features either a
standard 0-5 volt or 4-20 mA analog signal for reporting process concentration, as well as
4 digital status outputs for sensor diagnostics. A bi-directional serial interface is
also provided for computer control. All signals are carried via an 11-ft cable with a
15-pin D-Sub connector that is supplied with the sensor.
SPECIFICATIONS
Table 1-1 presents the instrument’s specifications.
Table 1-1. Specifications
PARAMETER
SPECIFICATION
Measurement Range *
50, 150 mg/L, depending on fluid port size
Units of Measure
mg/L
Precision
0.5 mg/L or 1% of reading (whichever is greater)
Repeatability
1% of Full Scale
Zero Drift
1% Full Scale/month (non–cumulative)
Response Time
2 seconds to 95%
Water Flow
Up to 150 SLPM
Power Input
+15 volts ±1.0 volt (1.0A maximum)
Analog Output *
0-5 VDC or 4-20 mA full scale
Serial Data *
RS232 or RS485, Half-Duplex, 9600 Baud
Enclosure Material
PTFE Teflon
®
Dimensions H x W x D
(typical envelope)
6.75" x 5.69" x 3.2" (172 mm x 145 mm x 82 mm)
Weight
6.6 lbs (3 kg)
Temperature Range
5 - 40
°
C
Humidity Range
0-95% RH non-condensing
Inlet/Outlet Fluid Ports
Range (mg/L)
Flow (LPM)
1” Flaretek™
0 – 50, 0 – 150
12 - 150
¾” Flaretek™
0 – 50, 0 – 150
6 - 75
½” Flaretek™
0 – 50, 0 – 150
1.5 - 10
Purge Port Size
¼” Flaretek™
* Must be specified at time of purchase
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 7
SAFETY
IEC/EN 61010-1:2010 (3rd Edition), Safety requirements for electrical equipment for
measurement, control, and laboratory use.
CE: [pending]
EMC
IEC/EN 61326-1, Class A Emissions/Industrial Immunity
EN55011 (CISPR 11), Group 1, Class A Emissions
FCC 47 CFR Part 15B, Class A Emissions
CE: [pending]
8 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
2. GETTING STARTED
This section addresses unpacking, connecting, and initializing the instrument.
UNPACKING
Upon receiving the Model 470 please verify that no apparent shipping damage has
occurred. If damage has occurred please advise shipper first, then notify Teledyne API.
The sensor features two hydraulic ports, two pneumatic ports for purge gas, and one
electrical 15-pin D-Sub connector at the end of a 11-ft Teflon jacketed cable*.
The 15-pin D-Sub connector serves as the interface for DC power, serial communications,
digital and analog signals. (See Figure 2-5).
*The cable’s 11-ft minimum length is intended to allow the D-Sub connector to reach a
non-corrosive environment away from the Model 470.
Figure 2-1. Sensor Diagram
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 9
MECHANICAL INSTALLATION
The sensor must be mounted vertically, with the ozonated solvent flowing upward. Use
screws made of a material that is chemically compatible with the process being monitored.
It is recommended that a 1-inch clearance be allowed on top and sides.
The following two illustrations provide dimensions (inches) for mounting:
Figure 2-2. Sensor Dimensions (control interface cable fixture not shown)
10 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
PNEUMATIC CONNECTIONS
CAUTION
Liquid flow should be as indicated by the flow direction of the arrow
on the sensor housing.
Figure 2-3: In-Line, Full-Flow Configuration
OZONE
GAS
RE- CIRCULATION
PUMP
IN JE CT OR
OZONE
CATALYST
470 SENSOR
IN-LINE
470 SENSOR
SIDE-STRE AM
DR AI N
PLC OR
STATUS DISPLAY
OZONE
BATH
MIXER
DIFFUSER
DE-BUBBLE R
F
igure 2-4: Typical Installation, In-Line or Side-Stream
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 11
ELECTRICAL CONNECTIONS
Electrical connections are made to the Model 470 using the provided 11-ft Teflon-jacketed
cable with 15-pin D-Sub connector. The pin-out of the 15-pin connector and typical
connections are shown in Figure 2-5.
CAUTION
If using a TAPI controller, connect ONLY to the SCI-552 Controller.
DO NOT connect the Model 470 to any of the following controllers:
SCI-Plus, SCI-Turbo, SCI-Turbo L, SCI-Turbo Mega, SCI-Turbo Mini
F
igure 2-5: Customer Interface
POWER SUPPLY
The Model 470 requires a +15 VDC power source capable of supplying 1.0 A. DC power
is connected through the male DB-15 connector. The positive terminal of the power supply
should be connected to pins 4 and 5 on the 15-pin connector and the common terminal
should be connected to pins 3 and 15.
ANALOG OUTPUT
The analog output is either a 0-5 volt or a 4-20 mA signal (per the corresponding Sales
Order), representing the ozone concentration measured by the sensor. The output is scaled
to the concentration range that the sensor has been set to measure. Check the serial number
label on the Model 470 to determine the concentration range.
For best performance, the 0-5 VDC analog output should be connected to a voltmeter or
A/D converter with a differential input and a minimum input impedance of 2KΩ.
12 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
The 4-20mA output has a built-in isolated loop power supply, and can drive receiver loads
of up to 400 ohms.
ZERO CALIBRATION INPUT
The zero calibration input is located on Digital Input #1. To zero the Model 470, Digital
Input #1 should be connected to the power common for at least 1 second. This can be
accomplished using a Normally Open switch or relay.
STATUS OUTPUTS
The Model 470 has four digital status outputs for indicating error status and when
operational parameters have moved out of normal limits. These outputs are in the form of
opto-isolated open-collector transistors. They can be used to drive status LED’s on a
display panel or interface to a digital device such as a Programmable Logic Controller
(PLC).
Figure 2-6 below shows the most common way of connecting the digital outputs to an
external device such as PLC. Note: Most devices, such as PLC’s, have internal provision
for limiting the current that the input will draw from an external device. When connecting
to a unit that does not have this feature, external dropping resistors must be used to limit
the current through the transistor output to 50mA or less.
Figure 2-6: Digital Status Outputs
SERIAL COMMUNICATION INTERFACE
The Model 470 features a bi-directional digital serial interface that can be used for sensor
control and data acquisition (Figure 2-1); It is configured for either RS232 or RS485
Protocol as selected at time of purchase order.
Opto-Isolator
Digital Output #1-4 (Collector)
Digital Output Common (Emmiter)
Ground Provided
by PLC
Programmable Logic
Controller or other device
M452
Digital
Input
+5V
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 13
3. OPERATION
INITIAL POWER-ON AND WARM-UP
Allow the sensor to warm at least overnight on initial startup or on any “cold” start. This
warm-up period should preferably be done while ozone-free fluid is flowing through the
sensor. After the warm-up period, zero the sensor (Section 2.4.3) with an ozone-free
reference fluid.
It is recommended that the sensor be powered on around the clock to ensure peak
performance, minimal zero drift, and maximum system life.
ZEROING THE SENSOR
Due to its innovative sensing technology, the Model 470 is a highly zero-stable instrument,
but should be zeroed periodically.
1. Purge the sensor with an ozone-free reference fluid, typically deionized water, to get
rid of dissolved ozone inside the optical chamber for about 15 minutes.
2. Start the zeroing process using the zero calibration digital input as described in
Section 2.4.3.
14 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
4. TROUBLESHOOTING
Troubleshooting based on the digital outputs. This section describes the digital outputs
(Figure 2-6 and Figure 2-5), Status Outputs #1 thru 4.
Table 4-1: Status Outputs
OUTPUT #
NAME
ON STATE
OFF STATE
1
Sensor
O.K.
Normal State
A Channel or B Channel ˃ 2995mV;
A Channel ˂ 250mV
2
Invalid
Reading
Ozone Concentration
Out of Range
Normal State
3 Lamp Low
A Channel Detector
< 350mV
Normal State
4 Cell Dirty
A Channel gain factor
falls < 0.5
Normal State
STATUS OUTPUT SUMMARY
Table 4-2 summarizes the Status Output descriptions and recommended actions.
• 1 = output is ON
• 0 = output is OFF
• X = output is in either state.
Table 4-2: Status Output Truth Table
SENSOR
OK
INVALID
READING
LAMP
LOW
CELL
DIRTY
ACTIONS
1 0 0 0 Normal operation, no action required.
0 X X X Service required (Section 5.1).
1 1 X X
Verify that concentration has not exceeded full
scale range of sensor.
Calibrate at Zero (Section 3.2).
1 X 1 X
Action may not be required immediately;
otherwise, service soon (Section 5.1).
1 X X 1
Calibrate at zero (Section 3.2).
Call for service (Section 5.1).
08681B DCN8036 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 15
STATUS OUTPUT DESCRIPTIONS
This section provides further description of the status outputs; follow any recommended
actions presented in Table 4-2.
SENSOR O.K.
The normal state for the Sensor O.K. output is ON. During the warm-up period on start-
up this output will stay off until the UV lamp reaches a minimum intensity. If this output
remains off after the 15-minute warm-up period, or goes off during normal operation, then
the instrument is in need of servicing.
If the Sensor O.K. output turns off AND the Lamp Low output is on, this indicates that the
lamp intensity is below the minimum level required for proper operation and is in need of
servicing.
If the Sensor O.K. output turns off and the Lamp Low output is also off, then one of the
analog voltages in the sensor has exceeded the range of the internal A/D converter.
INVALID READING
The normal state for the Invalid Reading output is OFF. If this output turns on, this
indicates that the instrument is still operational, but a system fault or calibration fault exists
that may make the current ozone reading invalid. The Invalid Reading output is turned on
for either of the following conditions:
• When the measured concentration has exceeded the full-scale concentration
r
ange of the sensor. Check the serial number tag for the full-scale concentrati
on
r
ange.
• The sensor is indicating an excessive negative reading.
LAMP LOW
The normal state for the Lamp Low output is OFF. If this output turns on, this indicates
that the UV lamp intensity of A Channel has dropped below 350mV.
If the Lamp Low output turns ON and the Sensor O.K. output is ON, this indicates that the
lamp intensity is still adequate for measurement, but service may be required soon.
If the Lamp Low output turns ON and the Sensor O.K. output is OFF, this indicates a
failure condition and accurate measurement is no longer possible.
CELL DIRTY
The normal state for the Cell Dirty output is OFF. If this output turns on, then the A
Channel gain factor has fallen to < 0.5. This value is calculated when the zero calibration
is performed.
When this output is on, it indicates a loss of optical transmission through the windows in
the absorption cell or a calibration fault.
16 Teledyne API Model 470 Dissolved Ozone Sensor User Manual 08681B DCN8036
5. MAINTENANCE
Aside from occasional calibration as described in this manual, there is no maintenance
required for the Model 470 in the field. The UV lamp is typically replaced once every 2-3
years at the factory; take action according to Table 4-2.
TECHNICAL ASSISTANCE
Our Technical Support Department can be reached as follows:
TELEDYNE API, TECHNICAL SUPPORT
9970 CARROLL CANYON ROAD
SAN DIEGO, CALIFORNIA 92131-1106
USA
Toll-free Phone:
800-324-5190
Phone:
858-657-9800
Fax:
858-657-9816
Email:
api-techsupport@teledyne.com
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